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  Home > JCE Print > Journal of Chemical Education > Issues > 2006  > June  >
Chemistry for Everyone
Products of Chemistry
Chemistry of Electronic Gases
James R. Clark
Glendale Community College, Glendale, AZ 85302
Cover
June 2006
Vol. 83 No. 6
p. 857
Abstract
The chemistry of electronic gases is reviewed, and their use as relevant examples of practical chemistry in the classroom is discussed. Electronic gases can be defined as those gases used in manufacturing by the electronics (i.e., semiconductor) industry. They are generally specialty gases used in relatively low volumes and high purity for specific applications. They are used in many different processes in the electronics industry, but the four most common applications are deposition and doping, etching, special atmospheres, and cleaning. The chemistry of electronic gases can be used in the classroom to provide many interesting examples of molecular structures, chemical reactions, periodic trends, and environmental chemistry.
More Information
*  Citation
 Clark, James R. J. Chem. Educ. 2006 83 857.
*  Keywords
 Applications of Chemistry; Chemical Engineering; First-Year Undergraduate / General; Gases; High School / Introductory Chemistry; Industrial Chemistry; Inorganic Chemistry; Second-Year Undergraduate; Semiconductors; Solid State Chemistry; Textbooks / Reference Books; Upper-Division Undergraduate
*  History
 Created:
Last Updated:		 4/24/2006
4/25/2006
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